Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8920567 | Post metal chemical-mechanical planarization cleaning process | Vamsi Devarapalli, Colin J. Goyette, Mahmoud Khojasteh, Qinghuang Lin, James J. Steffes +2 more | 2014-12-30 |