Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9581532 | Substrate edge clamping force tester | Bradley M. Mahan, Ralph W. Stevens, Jr., Tracy A. Tong | 2017-02-28 |
| 9348057 | Method and apparatus for calibrating sensors that detect wafer protrusion from a wafer cassette | Graham M. Bates, Bradley M. Mahan | 2016-05-24 |
| 9221241 | Apparatus and method for removing a CMP pad from a platen | Graham M. Bates, Jeffery A. Brigante | 2015-12-29 |
| 8715460 | Apparatus and method for removing a CMP pad from a platen | Graham M. Bates, Jeffery A. Brigante | 2014-05-06 |