Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9671323 | Detection of foreign material on a substrate chuck | Robert G. Carlson | 2017-06-06 |
| 9581532 | Substrate edge clamping force tester | John J. Bandy, Ralph W. Stevens, Jr., Tracy A. Tong | 2017-02-28 |
| 9348057 | Method and apparatus for calibrating sensors that detect wafer protrusion from a wafer cassette | John J. Bandy, Graham M. Bates | 2016-05-24 |