Issued Patents All Time
Showing 51–52 of 52 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4259145 | Ion source for reactive ion etching | Harold R. Kaufman | 1981-03-31 |
| 4250009 | Energetic particle beam deposition system | Jerome J. Cuomo, Richard J. Gambino, John D. Kupstis | 1981-02-10 |