Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6063245 | Magnetron sputtering method and apparatus utilizing a pulsed energy pattern | Peter Frach, Klaus Goedicke, Michael Junghähnel, Torsten Winkler, Friedel Haese +2 more | 2000-05-16 |