Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4836887 | Chlorofluorocarbon additives for enhancing etch rates in fluorinated halocarbon/oxidant plasmas | Timothy H. Daubenspeck | 1989-06-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4836887 | Chlorofluorocarbon additives for enhancing etch rates in fluorinated halocarbon/oxidant plasmas | Timothy H. Daubenspeck | 1989-06-06 |