Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5198090 | Sputtering apparatus for producing thin films of material | Cheng T. Horng, Robert O. Schwenker | 1993-03-30 |
| 4238312 | Sputtering system for optimizing quartz deposition uniformity | Carl P. Hayunga, Homi G. Sarkary | 1980-12-09 |