Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7040963 | Table of wafer polishing apparatus, method for polishing semiconductor wafer, and method for manufacturing semiconductor wafer | Yuji Okuda, Kazutaka MAJIMA, Masahiro Tsuji, Hideki Takagi, Shigeharu Ishikawa +1 more | 2006-05-09 |
| 7029379 | Wafer holding plate for wafer grinding apparatus and method for manufacturing the same | Yuji Okuda, Shigeharu Ishikawa, Atsushi Mishima | 2006-04-18 |
| 6916228 | Wafer holding plate for wafer grinding apparatus and method for manufacturing the same | Yuji Okuda, Shigeharu Ishikawa, Atsushi Mishima | 2005-07-12 |
| 6475068 | Wafer holding plate for wafer grinding apparatus and method for manufacturing the same | Yuji Okuda, Shigeharu Ishikawa, Atsushi Mishima | 2002-11-05 |