Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6129100 | Wafer cleaning apparatus and structure for holding and transferring wafer used in wafer cleaning apparatus | Kenichi Kitagawa, Kiyoshi Shimada, Tatsuo Kataoka, Takashi Yoneda, Yoshihito Tatehaba | 2000-10-10 |