Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8279432 | Particle inspection and removal apparatus and particle inspection and removal program | Kunio Ohtsuki | 2012-10-02 |
| 7733476 | Defect inspection apparatus and method | Tatsuo Ohka, Teruhiko Ikeda | 2010-06-08 |
| 7483128 | Foreign matter inspection apparatus and method | Shu Yoshinaga | 2009-01-27 |
| 6943880 | Spectroscopic ellipsometer with adjustable detection area | — | 2005-09-13 |
| 5796475 | Signal process method and apparatus for defect inspection | Dainichiro Kinoshita | 1998-08-18 |
| 5337140 | Optical detecting system wtih self-correction | Takashi Hagiwara, Dainichiro Kinoshita | 1994-08-09 |