Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7327444 | Substrate inspection apparatus and method | Nobuyuki Naka, Akihiro Katanishi, Yoshiyuki Nakajima, Kimihiko Arimoto | 2008-02-05 |
| 7295307 | Method of and apparatus for measuring stress of semiconductor material | Nobuyuki Naka, Akihiro Katanishi | 2007-11-13 |