Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7567872 | Film forming condition determination method, film forming method, and film structure manufacturing method | Hiroshi Funakubo, Yoshihisa Honda, Nataliya Nabatova-Gabain | 2009-07-28 |
| 7280208 | Optical characteristic analysis method, sample measuring apparatus and spectroscopic ellipsometer | Hiroshi Funakubo, Yoshihisa Honda, Nataliya Nabatova-Gabain | 2007-10-09 |