Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5380396 | Valve and semiconductor fabricating equipment using the same | Mitsuhiro Shikida, Kazuo Sato, Yoshio Kawamura, Shinji Tanaka, Yasuaki Horiuchi +1 more | 1995-01-10 |
| 5284179 | Valve and semiconductor fabricating equipment using the same | Mitsuhiro Shikida, Kazuo Sato, Yoshio Kawamura, Shinji Tanaka, Yasuaki Horiuchi +1 more | 1994-02-08 |