Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6589871 | Processing method, measuring method and producing method of semiconductor devices | Yoshio Kawamura, Kan Yasui, Masayuki Nagasawa, Ui Yamaguchi | 2003-07-08 |
| 6565424 | Method and apparatus for planarizing semiconductor device | Yoshio Kawamura, Kan Yasui, Masayuki Nagasawa, Ui Yamaguchi | 2003-05-20 |
| 6524961 | Semiconductor device fabricating method | Kan Yasui, Ryousei Kawai, Sadayuki Nishimura, Masahiko Sato, Yoshio Kawamura +1 more | 2003-02-25 |
| 6477825 | Flattening and machining method and apparatus | Kan Yasui | 2002-11-12 |
| 6390895 | Flattening and machining method and apparatus | Kan Yasui | 2002-05-21 |