| 6780757 |
Semiconductor integrated circuit device and method for making the same |
Masayuki Suzuki, Shinji Nishihara, Masashi Sahara, Shinichi Ishida, Hiromi Abe +3 more |
2004-08-24 |
| 6583049 |
Semiconductor integrated circuit device and method for making the same |
Masayuki Suzuki, Shinji Nishihara, Masashi Sahara, Shinichi Ishida, Hiromi Abe +3 more |
2003-06-24 |
| 6538329 |
Semiconductor integrated circuit device and method for making the same |
Masayuki Suzuki, Shinji Nishihara, Masashi Sahara, Shinichi Ishida, Hiromi Abe +3 more |
2003-03-25 |
| 6300237 |
Semiconductor integrated circuit device and method for making the same |
Masayuki Suzuki, Shinji Nishihara, Masashi Sahara, Shinichi Ishida, Hiromi Abe +3 more |
2001-10-09 |
| 5904556 |
Method for making semiconductor integrated circuit device having interconnection structure using tungsten film |
Masayuki Suzuki, Shinji Nishihara, Masashi Sahara, Shinichi Ishida, Hiromi Abe +3 more |
1999-05-18 |