Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4963239 | Sputtering process and an apparatus for carrying out the same | Hideaki Shimamura, Masao Sakata, Shigeru Kobayashi, Yuji Yoneoka, Tsuneaki Kamei +2 more | 1990-10-16 |