Issued Patents All Time
Showing 26–50 of 66 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6484415 | Vacuum processing apparatus | Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou | 2002-11-26 |
| 6473989 | Conveying system for a vacuum processing apparatus | Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou | 2002-11-05 |
| 6470596 | Vacuum processing apparatus and operating method therefor | Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou | 2002-10-29 |
| 6467186 | Transferring device for a vacuum processing apparatus and operating method therefor | Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou | 2002-10-22 |
| 6467187 | Vacuum processing apparatus and operating method therefor | Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou | 2002-10-22 |
| 6463678 | Substrate changing-over mechanism in a vaccum tank | Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou | 2002-10-15 |
| 6463676 | Vacuum processing apparatus and operating method therefor | Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou | 2002-10-15 |
| 6460270 | Vacuum processing apparatus | Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou | 2002-10-08 |
| 6457253 | Vacuum processing apparatus | Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou | 2002-10-01 |
| 6446353 | Vacuum processing apparatus | Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou | 2002-09-10 |
| D453402 | Vacuum processing equipment configuration | Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou | 2002-02-05 |
| 6332280 | Vacuum processing apparatus | Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou | 2001-12-25 |
| 6330755 | Vacuum processing and operating method | Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou | 2001-12-18 |
| 6330756 | Vacuum processing apparatus and operating method therefor | Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou | 2001-12-18 |
| 6314658 | Vacuum processing apparatus and operating method therefor | Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou | 2001-11-13 |
| 6301802 | Vacuum processing apparatus and operating method therefor | Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou | 2001-10-16 |
| 6301801 | Vacuum processing apparatus and operating method therefor | Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou | 2001-10-16 |
| 6263588 | Vacuum processing apparatus and operating method therefor | Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou | 2001-07-24 |
| 6112431 | Vacuum processing and operating method | Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou | 2000-09-05 |
| 6108929 | Vacuum processing apparatus | Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou | 2000-08-29 |
| 6070341 | Vacuum processing and operating method with wafers, substrates and/or semiconductors | Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou | 2000-06-06 |
| 6055740 | Vacuum processing apparatus and operating method therefor | Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou | 2000-05-02 |
| 6044576 | Vacuum processing and operating method using a vacuum chamber | Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou | 2000-04-04 |
| 6012235 | Vacuum processing apparatus and operating method therefor | Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou | 2000-01-11 |
| 5950330 | Vacuum processing apparatus and operating method therefor | Kouji Nishihata, Tsunehiko Tsubone, Atsushi Itou | 1999-09-14 |