Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7166013 | Polishing apparatus and method for producing semiconductors using the apparatus | Shigeo Moriyama, Yoshihiro Ishida, Takashi Kugaya, Shigeo Ootsuki, Soichi Katagiri +2 more | 2007-01-23 |
| 7137866 | Polishing apparatus and method for producing semiconductors using the apparatus | Shigeo Moriyama, Yoshihiro Ishida, Takashi Kugaya, Shigeo Ootsuki, Soichi Katagiri +2 more | 2006-11-21 |