Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5401356 | Method and equipment for plasma processing | Hiromichi Enami, Masanori Katsuyama, Akihiko Konno | 1995-03-28 |
| 5352324 | Etching method and etching apparatus therefor | Yasushi Gotoh, Tokuo Kure, Hiroshi Kawakami, Masanori Katsuyama, Hiromichi Enami | 1994-10-04 |