Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979168 | Method and apparatus for transferring substrate | Yuko Egawa, Tetsunori Kaji | 2005-12-27 |
| 6758647 | System for producing wafers | Tetsunori Kaji, Yuko Egawa | 2004-07-06 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979168 | Method and apparatus for transferring substrate | Yuko Egawa, Tetsunori Kaji | 2005-12-27 |
| 6758647 | System for producing wafers | Tetsunori Kaji, Yuko Egawa | 2004-07-06 |