Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10304655 | Charged particle beam device and evacuation method for same | Yuuta Ebine | 2019-05-28 |
| 10008361 | Charged particle beam device and installation method | Shuhei YABU, Naoto Koga, Isao Takahira, Shinichi Tomita, Hiroyuki Noda +1 more | 2018-06-26 |
| D687475 | Electron microscope | Mitsuru Oonuma, Akira Omachi, Junichi Katane, Hiroyuki Komuro, Tomoyasu Hirashima | 2013-08-06 |