Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7109494 | Deflector, method of manufacturing deflector, and charged particle beam exposure apparatus using deflector | Haruhito Ono, Masatake Akaike, Kenji Tamamori, Futoshi Hirose, Yasushi Koyama +2 more | 2006-09-19 |