Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7649172 | Charged particle beam equipment with magnification correction | Masaru Ozawa, Hiromi Inada, Hiroyuki Tanaka | 2010-01-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7649172 | Charged particle beam equipment with magnification correction | Masaru Ozawa, Hiromi Inada, Hiroyuki Tanaka | 2010-01-19 |