Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7846305 | Method and apparatus for increasing uniformity in ion mill process | Pei C. Chen, Laurence S. Samuelson, Yongjian Sun | 2010-12-07 |
| 7560225 | Method of forming uniform features using photoresist | Pei C. Chen, Cherngye Hwang, Diana Perez, Eric Sun | 2009-07-14 |