Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8497475 | Method and apparatus for charged particle beam inspection | Chang-Chun Yeh | 2013-07-30 |
| 8063363 | Method and apparatus for charged particle beam inspection | Chang-Chun Yeh | 2011-11-22 |