Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7749930 | Holder made from quartz glass for the processing of semiconductor wafers and method for production of the holder | Juergen Weber, Martin Trommer, Bodo Kuehn, Ulrich Kirst, Waltraud Werdecker | 2010-07-06 |