Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9834468 | Optical component made of quartz glass for use in ArF excimer laser lithography and method for producing the component | — | 2017-12-05 |
| 9416040 | Blank of titanium-doped glass with a high silica content for a mirror substrate for use in EUV lithography and method for the production thereof | — | 2016-08-16 |
| 9272942 | Method for producing synthetic quartz glass and quartz glass for use as cladding material of an optical fiber | Martin Trommer, Steffen Zwarg, Ralph Sattman | 2016-03-01 |
| 8931307 | Blank of titanium-doped glass with a high silica content for a mirror substrate for use in EUV lithography and method for the production thereof | — | 2015-01-13 |
| 7981824 | Quartz glass blank and method for producing said blank | Wolfgang Englisch, Ralf Takke, Bruno Uebbing, Rainer Koeppler | 2011-07-19 |
| 7980098 | Method for producing an optical component of synthetic quartz glass with enhanced radiation resistance, and blank for producing the component | Steffen Kaiser, Denis Kassube, Kerstin Merget | 2011-07-19 |
| 7954341 | Method for making a blank from material, particularly for an optical component for use in microlithography | Stefan Ochs | 2011-06-07 |
| 7749930 | Holder made from quartz glass for the processing of semiconductor wafers and method for production of the holder | Juergen Weber, Tobias Pogge, Martin Trommer, Ulrich Kirst, Waltraud Werdecker | 2010-07-06 |
| 7707855 | Method for producing synthetic quartz glass with predetermined hydroxyl group content | Stephan Ochs | 2010-05-04 |
| 7691766 | Material, particularly for an optical component for use in microlithography, and method for making a blank from the material | Stefan Ochs | 2010-04-06 |
| 7637126 | Method for the production of laser-active quartz glass and use thereof | Rainer Koeppler, Waltraud Werdecker, Ulrich Kirst, Walter Lehmann | 2009-12-29 |
| 7501367 | Optical component of quartz glass, method for producing said component, and method for exposing a substrate | Stephan Ochs, Steffen Kaiser, Denis Kassube | 2009-03-10 |