Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11062934 | Vacuum chuck for clamping workpieces, measuring devices and method for checking workpieces, in particular wafers | Paul Boos | 2021-07-13 |
| 10707112 | Vacuum chuck for clamping workpieces, measuring devices and method for checking workpieces, in particular wafers | Paul Boos | 2020-07-07 |
| 10060718 | Measuring probe with attenuating device for measuring the thickness of thin films | — | 2018-08-28 |
| 9976943 | Device to position and align a rotationally-symmetrical body | Henry Thiele, Paul Boos | 2018-05-22 |
| 4406948 | Device for measuring thin films by means of beta radiation | Helmut Fischer, Willi Steegmuller | 1983-09-27 |
| 4258675 | Regulator apparatus such as a centrifugal governor for internal combustion engines | Friedrich Russeler, Ernst Ritter, Reinhard Schwartz | 1981-03-31 |