Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10886052 | Adsorption bar, vacuum aligner system, and control method of vacuum aligner system | Benxiang Hou, Jun Xie | 2021-01-05 |
| 10864556 | Tank for substrate cleaning, tank heating apparatus, tank heating method, and substrate cleaning apparatus | Zhiguang Guo, Jinxia Hu, Xin Cai, Jianfeng Liu, Jing Li | 2020-12-15 |