Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11131504 | Temperature monitoring system and method for a substrate heating furnace | Xin Xiang, Zhiguang Guo, Yunjie Wang, Fan Yang | 2021-09-28 |
| 10969643 | Mask and manufacturing method thereof, and light shielding device and control method thereof | Zhiguang Guo, Xilei Yin, Xin Xiang | 2021-04-06 |
| 10886052 | Adsorption bar, vacuum aligner system, and control method of vacuum aligner system | Dahu Tang, Jun Xie | 2021-01-05 |