Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5932022 | SC-2 based pre-thermal treatment wafer cleaning process | Jack H. Linn, George V. Rouse, Roberta R. Nolan-Lobmeyer, Diana L. Hackenberg, Steven T. Slasor +1 more | 1999-08-03 |