Patents per Year
Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 6526995 | Brushless multipass silicon wafer cleaning process for post chemical mechanical polishing using immersion | — | 2003-03-04 | $15,968,000 |
| 5932022 | SC-2 based pre-thermal treatment wafer cleaning process | Jack H. Linn, George V. Rouse, Sana Rafie, Roberta R. Nolan-Lobmeyer, Steven T. Slasor +1 more | 1999-08-03 | $5,492,000 |
| 5237878 | Apparatus and method for sampling ultra-pure chemical | — | 1993-08-24 |