Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6526995 | Brushless multipass silicon wafer cleaning process for post chemical mechanical polishing using immersion | — | 2003-03-04 |
| 5932022 | SC-2 based pre-thermal treatment wafer cleaning process | Jack H. Linn, George V. Rouse, Sana Rafie, Roberta R. Nolan-Lobmeyer, Steven T. Slasor +1 more | 1999-08-03 |
| 5237878 | Apparatus and method for sampling ultra-pure chemical | — | 1993-08-24 |