Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12427619 | Wafer conveying device, chemical mechanical planarization apparatus and wafer conveying method | Zhipeng Zhou | 2025-09-30 |
| 11794304 | Wafer polishing device | Yaomin Deng | 2023-10-24 |