Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12017293 | Electrochemical mechanical polishing and planarization equipment for processing conductive wafer substrate | Zhengting ZHU, Donghui Wang | 2024-06-25 |
| 11794304 | Wafer polishing device | Yuansi YANG | 2023-10-24 |