Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11305985 | MEMS device and manufacturing method thereof | Wei Sun, Chen Liu, Junshan Ge, Zhijian Ma | 2022-04-19 |
| 11212611 | MEMS microphone and manufacturing method thereof | Fuhe Sun, Chen Liu, Wenchao Jin, Wenliang Sun | 2021-12-28 |
| 11161734 | MEMS assembly and manufacturing method thereof | Chen Liu, Feng Ji, Xiaoli Zhang | 2021-11-02 |
| 10770340 | Isolation structure and manufacturing method thereof for high-voltage device in a high-voltage BCD process | Shaohua Zhang, Yulei Jiang, Yanghui Sun, Guoqiang Yu | 2020-09-08 |
| 10513431 | Multiple silicon trenches forming method for MEMS sealing cap wafer and etching mask structure thereof | Chen Liu, Feng Ji, Liwen Li | 2019-12-24 |
| 10081541 | Multiple silicon trenches forming method for MEMS sealing cap wafer and etching mask structure thereof | Chen Liu, Feng Ji, Liwen Li | 2018-09-25 |
| 9824913 | Isolation structure and manufacturing method thereof for high-voltage device in a high-voltage BCD process | Shaohua Zhang, Yulei Jiang, Yanghui Sun, Guoqiang Yu | 2017-11-21 |