Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11305985 | MEMS device and manufacturing method thereof | Wei Sun, Yongxiang Wen, Junshan Ge, Zhijian Ma | 2022-04-19 |
| 11212611 | MEMS microphone and manufacturing method thereof | Yongxiang Wen, Fuhe Sun, Wenchao Jin, Wenliang Sun | 2021-12-28 |
| 11161734 | MEMS assembly and manufacturing method thereof | Yongxiang Wen, Feng Ji, Xiaoli Zhang | 2021-11-02 |
| 10513431 | Multiple silicon trenches forming method for MEMS sealing cap wafer and etching mask structure thereof | Yongxiang Wen, Feng Ji, Liwen Li | 2019-12-24 |
| 10081541 | Multiple silicon trenches forming method for MEMS sealing cap wafer and etching mask structure thereof | Yongxiang Wen, Feng Ji, Liwen Li | 2018-09-25 |