Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7560011 | Sputtering target and method/apparatus for cooling the target | Hendryk Richert, Uwe Kriltz, Armin Schmidt, Gerald Janicke | 2009-07-14 |
| 7504011 | Sputtering target and method/apparatus for cooling the target | Armin Schmidt, Gerald Janicke, Hendryk Richert, Bernd Gruenler, Hans-Jurgen Tiller +1 more | 2009-03-17 |