Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7563347 | Method of forming coated article using sputtering target(s) and ion source(s) and corresponding apparatus | Uwe Kriltz, Jochen Butz, Vijayen S. Veerasamy | 2009-07-21 |
| 7560011 | Sputtering target and method/apparatus for cooling the target | Hendryk Richert, Uwe Kriltz, Armin Schmidt, Roland Weidl | 2009-07-14 |
| 7504011 | Sputtering target and method/apparatus for cooling the target | Armin Schmidt, Roland Weidl, Hendryk Richert, Bernd Gruenler, Hans-Jurgen Tiller +1 more | 2009-03-17 |