Issued Patents All Time
Showing 51–59 of 59 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6489225 | Method for controlling dopant profiles and dopant activation by electron beam processing | Matthew Ross, Charles Hannes | 2002-12-03 |
| 6407399 | Uniformity correction for large area electron source | — | 2002-06-18 |
| 6218090 | Method of creating controlled discontinuity between photoresist and substrate for improving metal lift off | Jason P. Minter | 2001-04-17 |
| 6195246 | Electrostatic chuck having replaceable dielectric cover | David M. Rose, Richard L. Ross | 2001-02-27 |
| 6150070 | Method of creating optimal profile in single layer photoresist | Jason P. Minter | 2000-11-21 |
| 6132814 | Method for curing spin-on-glass film utilizing electron beam radiation | Matthew Ross, Anthony L. Rubiales | 2000-10-17 |
| 5468595 | Method for three-dimensional control of solubility properties of resist layers | — | 1995-11-21 |
| 5003178 | Large-area uniform electron source | — | 1991-03-26 |
| 4528452 | Alignment and detection system for electron image projectors | — | 1985-07-09 |