Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10330599 | Calibration curve determination method, carbon concentration measurement method, and silicon wafer-manufacturing method | Yuta NAGAI | 2019-06-25 |
| 9541452 | Calibration curve formation method, impurity concentration measurement method, and semiconductor wafer manufacturing method | Kazuhiko Kashima | 2017-01-10 |