Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11081359 | Methods for polishing semiconductor substrates that adjust for pad-to-pad variance | Ichiro Yoshimura, Alex Chu, Sumeet S. Bhagavat, Taehyeong Kim, Norimasa Katakura +1 more | 2021-08-03 |
| 10600634 | Semiconductor substrate polishing methods with dynamic control | Alex Chu, Hsin-Yi Chi, Francis Y. Hung, Jones Yang, J. W. Lu | 2020-03-24 |