Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10185312 | Insitu tool health and recipe quality monitoring on a CDSEM | Daniel Fischer, Yvonne Jänicke, Stephan Melzig, Alexander Ullrich | 2019-01-22 |
| 8752805 | Pressure control valve | Benjin Luo, Mehmet-Fatih Sen, Frank Wauro, David Jayanth | 2014-06-17 |