AU

Alexander Ullrich

Globalfoundries: 1 patents #2,221 of 4,424Top 55%
📍 Dresden, DE: #1,650 of 3,254 inventorsTop 55%
Overall (All Time): #2,839,039 of 4,157,543Top 70%
1
Patents All Time

Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10185312 Insitu tool health and recipe quality monitoring on a CDSEM Daniel Fischer, Yvonne Jänicke, Stephan Melzig, Martin Pilz 2019-01-22