Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8585465 | Planarization of a material system in a semiconductor device by using a non-selective in situ prepared slurry | Johannes Groschopf, Rico Hueselitz, Katja Steffen | 2013-11-19 |