Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9064891 | Gate encapsulation achieved by single-step deposition | Fabian Koehler, Bianca Antonioli-Trepte | 2015-06-23 |
| 9018106 | Film deposition with improved in-wafer uniformity | Fabian Koehler, Bianca Antonioli-Trepte | 2015-04-28 |
| 8716149 | Methods for fabricating integrated circuits having improved spacers | Fabian Koehler, Sergej Mutas, Dina H. Triyoso | 2014-05-06 |