Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9064084 | Topography driven OPC and lithography flow | Ushasree Katakamsetty, Yang Qing, Wee Kwong Yeo, Chiu Wing Hui, Shyue Fong Quek | 2015-06-23 |
| 9026954 | Surface topography enhanced pattern (STEP) matching | Ushasree Katakamsetty, Wee Kwong Yeo | 2015-05-05 |