| 7054000 |
Method of calibration of magnification of microscopes having different operational principles for bringing them into a single, absolute scale |
Arkady Nikitin, Albert Sicignano, Tim Goldburt |
2006-05-30 |
| 6982138 |
Method of controlling removal of photoresist in openings of a photoresist mask |
Arkady Nikitin |
2006-01-03 |
| 6969852 |
Method of evaluating of a scanning electron microscope for precise measurements |
Arkady Nikitin |
2005-11-29 |
| 6909791 |
Method of measuring a line edge roughness of micro objects in scanning microscopes |
Arkady Nikitin |
2005-06-21 |
| 6686587 |
Method of precision calibration of magnification of a scanning microscopes with the use of test diffraction grating |
Arkady Nikitin |
2004-02-03 |
| 6664532 |
Method of precision calibration of magnification of scanning microscopes with the use of test diffraction grating |
Arkady Nikitin |
2003-12-16 |
| 6661007 |
Method of diagnosing magnification, linearity and stability of scanning electron microscope |
Albert Sicignano, Tim Goldburt |
2003-12-09 |
| 6608294 |
Simple method of precision calibration of magnification of a scanning microscopes with the use of test diffraction grating |
Arkady Nikitin |
2003-08-19 |
| 6596993 |
Method of automatically correcting magnification and non-linearity of scanning electron microscope |
Albert Sicignano, Tim Goldburt |
2003-07-22 |
| 6573500 |
Method of precision calibration of magnification of a scanning microscope with the use of test diffraction grating |
Arkady Nikitin |
2003-06-03 |