| 7427756 |
Method of precision measurements of sizes and line width roughness of small objects in accordance with their images obtained in scanning electron microscope |
— |
2008-09-23 |
| 7209596 |
Method of precision calibration of a microscope and the like |
— |
2007-04-24 |
| 7054000 |
Method of calibration of magnification of microscopes having different operational principles for bringing them into a single, absolute scale |
Albert Sicignano, Dmitriy Yeremin, Tim Goldburt |
2006-05-30 |
| 6982138 |
Method of controlling removal of photoresist in openings of a photoresist mask |
Dmitriy Yeremin |
2006-01-03 |
| 6978215 |
Method of determining of true nonlinearity of scan along a selected direction X or Y in scan microscope |
— |
2005-12-20 |
| 6969852 |
Method of evaluating of a scanning electron microscope for precise measurements |
Dmitriy Yeremin |
2005-11-29 |
| 6909791 |
Method of measuring a line edge roughness of micro objects in scanning microscopes |
Dmitriy Yeremin |
2005-06-21 |
| 6878935 |
Method of measuring sizes in scan microscopes |
— |
2005-04-12 |
| 6807314 |
Method of precision calibration of a microscope and the like |
Alexey I. Kozlitin |
2004-10-19 |
| 6686587 |
Method of precision calibration of magnification of a scanning microscopes with the use of test diffraction grating |
Dmitriy Yeremin |
2004-02-03 |
| 6668099 |
Method of measuring an angle of inclination of trapezoidal micro object side faces |
— |
2003-12-23 |
| 6664532 |
Method of precision calibration of magnification of scanning microscopes with the use of test diffraction grating |
Dmitriy Yeremin |
2003-12-16 |
| 6608294 |
Simple method of precision calibration of magnification of a scanning microscopes with the use of test diffraction grating |
Dmitriy Yeremin |
2003-08-19 |
| 6573500 |
Method of precision calibration of magnification of a scanning microscope with the use of test diffraction grating |
Dmitriy Yeremin |
2003-06-03 |
| 6563116 |
Method of measuring sizes of trapezoidal structure |
— |
2003-05-13 |