Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11075140 | Heat conduction structure or semiconductor apparatus | Takeshi Bessho, Masataka Deguchi, Nagahiro Saito | 2021-07-27 |
| 8809919 | Semiconductor device with inverted trapezoidal cross sectional profile in surface areas of substrate | Hidekazu Sato | 2014-08-19 |
| 8685265 | Manufacturing method of semiconductor device and semiconductor manufacturing apparatus | Yoshiyuki Nakao | 2014-04-01 |
| 8592951 | Semiconductor wafer having W-shaped dummy metal filling section within monitor region | Hidekazu Sato | 2013-11-26 |
| 8163572 | Method for evaluating impurity distribution under gate electrode without damaging silicon substrate | Hidekazu Sato | 2012-04-24 |
| 8114764 | Semiconductor device and fabrication method thereof | Hidekazu Sato | 2012-02-14 |
| 7691649 | Method for evaluating impurity distribution under gate electrode without damaging silicon substrate | Hidekazu Sato | 2010-04-06 |
| 7642192 | Semiconductor device and fabrication method thereof | Hidekazu Sato | 2010-01-05 |
| 6528413 | Semiconductor device and method of manufacturing the same | — | 2003-03-04 |
| 5830807 | Successive dry etching of alternating laminate | Daisuke Matsunaga, Genichi Komuro | 1998-11-03 |
| 5322589 | Process and apparatus for recrystallization of semiconductor layer | Hidesato Matsuoka | 1994-06-21 |