Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9349600 | Semiconductor device manufacturing method and semiconductor device | Satoshi Torii, Hideaki Matsumura, Hikaru Kokura, Etsuro Kawaguchi, Yuka Kase +1 more | 2016-05-24 |
| 8980710 | Manufacturing method of semiconductor device | Taiji Ema, Mitsuaki Hori, Kazushi Fujita, Makoto Yasuda | 2015-03-17 |
| 8497191 | Selective epitaxial growth method using halogen containing gate sidewall mask | Masahiro Fukuda, Yosuke Shimamune, Masaaki Koizuka | 2013-07-30 |
| 8481383 | Method of forming semiconductor device having buffer layer between sidewall insulating film and semiconductor substrate | Hiroyuki Ohta | 2013-07-09 |
| 8409958 | Method of manufacturing semiconductor device | Masatoshi Nishikawa, Yosuke Shimamune | 2013-04-02 |
| 8232217 | Film deposition apparatus, method of manufacturing a semiconductor device, and method of coating the film deposition apparatus | — | 2012-07-31 |
| 7906798 | Semiconductor device having buffer layer between sidewall insulating film and semiconductor substrate | Hiroyuki Ohta | 2011-03-15 |
| 7883960 | Method of manufacturing semiconductor device | Masatoshi Fukuda, Akiyoshi Hatada, Kenichi Okabe, Tomonari Yamamoto | 2011-02-08 |
| 7678641 | Semiconductor device and fabrication process thereof | Toshifumi Mori, Takashi Watanabe, Hiroyuki Ohta | 2010-03-16 |
| 7678711 | Semiconductor device, and method and apparatus for manufacturing the same | Mitsuaki Hori, Hiroyuki Ohta | 2010-03-16 |
| 7679147 | Semiconductor device fabricated by selective epitaxial growth method | Masahiro Fukuda, Yosuke Shimamune, Masaaki Koizuka | 2010-03-16 |
| 7446394 | Semiconductor device fabricated by selective epitaxial growth method | Masahiro Fukuda, Yosuke Shimamune, Masaaki Koizuka | 2008-11-04 |